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6inch Ge Single Substrate Specifications

Grade

PrimeEpi-Ready

Conduct Type

S-C-P

Dopant

Ga-dopant

Dimensions

150.0±0.1mm

Thickness

175μm±10μm According to customer requirements

Orientation

100)±0.1°According to customer requirements

EPD

<1000/cm2

Edge Beveling

Yes

CC

 According to customer requirements

Resistivity(300K)

 According to customer requirements

Mobility

 According to customer requirements

TTV/Bow/Warp

10μm

Surface Finish

 Side1Polished      Side2Etched

Packaging

Cassette or Tray

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